JPH0141462Y2 - - Google Patents

Info

Publication number
JPH0141462Y2
JPH0141462Y2 JP11508486U JP11508486U JPH0141462Y2 JP H0141462 Y2 JPH0141462 Y2 JP H0141462Y2 JP 11508486 U JP11508486 U JP 11508486U JP 11508486 U JP11508486 U JP 11508486U JP H0141462 Y2 JPH0141462 Y2 JP H0141462Y2
Authority
JP
Japan
Prior art keywords
filter
installation board
outside
frame
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11508486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320916U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11508486U priority Critical patent/JPH0141462Y2/ja
Publication of JPS6320916U publication Critical patent/JPS6320916U/ja
Application granted granted Critical
Publication of JPH0141462Y2 publication Critical patent/JPH0141462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP11508486U 1986-07-25 1986-07-25 Expired JPH0141462Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320916U JPS6320916U (en]) 1988-02-12
JPH0141462Y2 true JPH0141462Y2 (en]) 1989-12-07

Family

ID=30998415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11508486U Expired JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0141462Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02223661A (ja) * 1989-02-27 1990-09-06 Masanori Okamoto エアーフィルター清浄装置
JPH07114908B2 (ja) * 1989-05-22 1995-12-13 謹造 神田 エアクリーナのクリーニング装置
JPH11319453A (ja) * 1998-05-08 1999-11-24 Shigenori Yamazaki エアフィルタ用エレメントの清掃装置

Also Published As

Publication number Publication date
JPS6320916U (en]) 1988-02-12

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